MEMS/MOEMS packaging :
Gilleo, Ken.
MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo. - 1st ed. - New York : McGraw-Hill, c2005. - xiii, 220 p. : ill. ; 24 cm. - McGraw-Hill nanoscience and technology series .
Includes bibliographical references (p. 203-213) and index.
0071455566
2005049594
Microelectronic packaging.
Microelectromechanical systems.
Optoelectronic devices.
TK7870.15 / .G55 2005
621.381046
MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo. - 1st ed. - New York : McGraw-Hill, c2005. - xiii, 220 p. : ill. ; 24 cm. - McGraw-Hill nanoscience and technology series .
Includes bibliographical references (p. 203-213) and index.
0071455566
2005049594
Microelectronic packaging.
Microelectromechanical systems.
Optoelectronic devices.
TK7870.15 / .G55 2005
621.381046